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Sputtering
Model | Max Output | introduction | |
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Voltage(KV) | Power(W) | ||
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0.125KV 0.25KV 0.5KV 1KV 2KV 4KV 6KV 8KV 10KV 12KV 15KV 20KV 25KV 30KV 35KV 40KV 45KV 50KV 55KV 60KV |
60W 125W 250W |
1. Wide voltage input DC11V-DC32V 2. Models from 0.125KV to 60kV 3. Ultra-thin 60W, 125W, 250W 4. The maximum current can be output under 0V output 5. Fast rise time, extremely low overshoot 6. Fixed frequency, low energy storage design 7. MTBF>200,000 hours at 65℃ 8. Temperature coefficient 25ppm/℃ (10ppm optional) 9. Line regulation 0.01% 10. Load regulation 0.01% 11. Short circuit protection, arc protection 12. Optional RS-485, RS-232 communication 13. OEM customization available |
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1KV 2KV 3KV 4KV 6KV 10KV 15KV 20KV 30KV 40KV 50KV 60KV 70KV 80KV 90KV 100KV 120KV |
3000W 4000W 6400W |
1. Input 220Vac±10%,38A 2. AC/DC output voltage 120KV, output power 3kW,4kW,6.4kW 4. low output ripple and noise <0.1%p-p 5. high stability 0.02%/8 hour 6. low temperature coefficient 25ppm/℃ 8. Ethernet, RS-232, Optional RS485 Digital Interfaces 9. Overvoltage, Arc and short circuit Protected 10. Voltage and current adjustment function 11. Local or remote control, or digital control 12. Safety interlock function 14. OEM customization available 15. CE certification |
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1KV 2KV 3KV 4KV 6KV 8KV 10KV 12KV 15KV 20KV 30KV 40KV 50KV 60KV 70KV 80KV 100KV 120KV 130KV 150KV |
6000W |
1. Input 360-528Vac, three phase 12.5 amps 2. Models from 1KV to 150kV, 6kW 4. low output ripple and noise <0.1%p-p 5. high stability 0.02%/8 hour 6. low temperature coefficient 25ppm/℃ 8. Ethernet, RS-232, Optional RS485 Digital Interfaces 9. Overvoltage, Arc and short circuit Protected 10. Voltage and current adjustment function 11. Local or remote control, or digital control 12. Safety interlock function 14. OEM customization available 15. CE certification |
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1KV 2KV 3KV 4KV 6KV 8KV 10KV 12KV 15KV 20KV 30KV 40KV 50KV 60KV 70KV 80KV 100KV 120KV 130KV 150KV 225KV |
12000W 24000W 36000W 48000W 60000W 72000W 84000W 96000W |
1. Input 360-528Vac, three phase 25 amps 2. Models from 1KV to 300kV,12kW 3. Parallel Capability 24kW, 36kW, 48kW...100kW 4. low output ripple and noise <0.1%p-p 5. high stability 0.02%/8 hour 6. low temperature coefficient 25ppm/℃ 7. Ethernet, RS-232, Optional RS485 Digital Interfaces 8. Overvoltage, Arc and short circuit Protected 9. Voltage and current adjustment function 10. Local or remote control, or digital control 11. Safety interlock function 12. OEM customization available 13. CE certification |
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3KV 5KV 10KV 15KV 20KV 30KV |
15W |
1. Input voltage 105Vac~125Vac or 210Vac~250Vac. 2. Output voltage 30kVmax, output power 15W. 3. Low output ripple and noise≤ 0.05%p-p. 4. High stability 0.01% per hour. 5. Low temperature coefficient 25ppm/℃. 6. Strong arc protection and short circuit protection. 7. External potentionmeter or external control voltage to set. 8. Air insulation, the mimum storage is 200mJ. 9. Postive or Negative output. |
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1KV 2KV 3KV 6KV 8KV 10KV 15KV 20KV 30KV 40KV 50KV 60KV 70KV 80KV 100KV 120KV 130KV |
10W 30W 60W 100W 150W 300W 400W 600W 750W |
1.AC/DC output voltage up to 130KV, max output power 750W 2. Ripple: 0.1% P-P temperature coefficient: ≤25ppm/℃ 3. Stability: <100ppm per hour after starting for half an hour 4.Two Kinds of chassis height, multiple models can be selected, through the EU CE certification 5.The maximum output voltage ranging from 1KV-130KV 6. Nine models with maximum output power from 10W to 750W are available 7. Overvoltage, arc pulling and output short circuit protection 8. Voltage and current regulation function 9. Local or remote control 10. Security interlock function 11. Can be customized according to user requirements 12. High stability 13. Standard network port,RS-232, RS-485 optional |