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Ion Implantation
Model | Max Output | introduction | |
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Voltage(KV) | Power(W) | ||
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1KV 3KV 5KV 10KV 15KV 20KV 30KV 40KV 50KV 60KV 70KV |
120W |
1. Power factor corrected input 86Vac~265Vac 2. Models from 1kV to 70kV, 120W 3. Low output ripple and noise ≤ 0.1% P-P 4. High stability 0.02% every 8 hours 5. Low temperature coefficient 0.0025%/ ℃ 6. Arc and short circuit Protected 7. External potentiometer or external control voltage to set. 8. Optional USB2.0, RS-232, RS-422 control, 9. Positive or negative output 10. OEM customization available |
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1KV 2KV 3KV 6KV 8KV 10KV 15KV 20KV 30KV 40KV 50KV 60KV 70KV 80KV 100KV 120KV 130KV |
10W 30W 60W 100W 150W 300W 600W 1200W |
1. Input 220Vac±10%,Optional 115Vac 2. Models from 1KV to 130kV, 10W to 1.2kW 4. low output ripple and noise <0.1%p-p 5. high stability 0.02%/8 hour 6. low temperature coefficient 25ppm/℃ 8. Ethernet, RS-232, Optional RS485 Digital Interfaces 9. Overvoltage, Arc and short circuit Protected 10. Voltage and current adjustment function 11. Local or remote control, or digital control 12. Safety interlock function 14. OEM customization available 15. CE certification |
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0.5KV 1KV 2KV 3KV 5KV 8KV 10KV 15KV 20KV 30KV 40KV 50KV 60KV |
2000W |
1. Input 220Vac±10%,19A 2. Models from 0.5KV to 100kV, 2kW 4. low output ripple and noise <0.1%p-p 5. high stability 0.02%/8 hour 6. low temperature coefficient 25ppm/℃ 8. Ethernet, RS-232, Optional RS485 Digital Interfaces 9. Overvoltage, Arc and short circuit Protected 10. Voltage and current adjustment function 11. Local or remote control, or digital control 12. Safety interlock function 14. OEM customization available 15. CE certification |
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150KV 160KV 180KV 200KV 300KV |
2000W |
1. Input 220Vac±10%,19A 2. Models from 150KV to 300kV, 2kW 4. low output ripple and noise <0.1%p-p 5. high stability 0.02%/8 hour 6. low temperature coefficient 25ppm/℃ 8. Ethernet, RS-232, Optional RS485 Digital Interfaces 9. Overvoltage, Arc and short circuit Protected 10. Voltage and current adjustment function 11. Local or remote control, or digital control 12. Safety interlock function 14. OEM customization available 15. CE certification |
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1KV 2KV 3KV 4KV 6KV 10KV 15KV 20KV 30KV 40KV 50KV 60KV 70KV 80KV 90KV 100KV 120KV |
3000W 4000W 6400W |
1. Input 220Vac±10%,38A 2. AC/DC output voltage 120KV, output power 3kW,4kW,6.4kW 4. low output ripple and noise <0.1%p-p 5. high stability 0.02%/8 hour 6. low temperature coefficient 25ppm/℃ 8. Ethernet, RS-232, Optional RS485 Digital Interfaces 9. Overvoltage, Arc and short circuit Protected 10. Voltage and current adjustment function 11. Local or remote control, or digital control 12. Safety interlock function 14. OEM customization available 15. CE certification |
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9KV 10KV 12KV 15KV 20KV 25KV 30KV 40KV 50KV 60KV 70KV 80KV 100KV 125KV 150KV |
5000W |
1. AC/DC output voltage 150KV, output power 5kW 2. Ripple voltage: 0.05% P-P Temperature coefficient: 25ppm/℃ 3. Stability: less than 0.01% per hour after 1 hour of power-on 4. Low starting voltage, fast response, strong anti-sparking 5. AC220V three-phase power supply or AC380V three-phase 6. Arc and short-circuit protection 7. Voltage and current regulation function 8. Local or remote control 9. Safety interlock function 10.OEM customization available 11. SEMI certification |
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1KV 2KV 3KV 4KV 6KV 8KV 10KV 12KV 15KV 20KV 30KV 40KV 50KV 60KV 70KV 80KV 100KV 120KV 130KV 150KV |
6000W |
1. Input 360-528Vac, three phase 12.5 amps 2. Models from 1KV to 150kV, 6kW 4. low output ripple and noise <0.1%p-p 5. high stability 0.02%/8 hour 6. low temperature coefficient 25ppm/℃ 8. Ethernet, RS-232, Optional RS485 Digital Interfaces 9. Overvoltage, Arc and short circuit Protected 10. Voltage and current adjustment function 11. Local or remote control, or digital control 12. Safety interlock function 14. OEM customization available 15. CE certification |
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1KV 2KV 3KV 4KV 6KV 8KV 10KV 12KV 15KV 20KV 30KV 40KV 50KV 60KV 70KV 80KV 100KV 120KV 130KV 150KV 225KV |
12000W 24000W 36000W 48000W 60000W 72000W 84000W 96000W |
1. Input 360-528Vac, three phase 25 amps 2. Models from 1KV to 300kV,12kW 3. Parallel Capability 24kW, 36kW, 48kW...100kW 4. low output ripple and noise <0.1%p-p 5. high stability 0.02%/8 hour 6. low temperature coefficient 25ppm/℃ 7. Ethernet, RS-232, Optional RS485 Digital Interfaces 8. Overvoltage, Arc and short circuit Protected 9. Voltage and current adjustment function 10. Local or remote control, or digital control 11. Safety interlock function 12. OEM customization available 13. CE certification |
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-40KV |
400W |
1. Input 220Vac±10%,Optional 115Vac 2. Models -40kV, 10W to 400kW 4. low output ripple and noise <0.1%p-p 5. high stability <100ppm/8hour, after half an hour of startup 6. low temperature coefficient 25ppm/℃ 7. Overvoltage, Arc and short circuit Protected 8. Voltage and current adjustment function 9. Local or remote control, or digital control 10. Safety interlock function 11. OEM customization available 12. CE certification |
|
5KV |
100W |
1.Output voltage: 0 to ±5 kV DC or peak AC 7. Dynamically adjust to optimize AC response for various load parameters 8. Local and remote high voltage on/off function, short circuit protection 9. Low output noise, closed-loop system guarantees high accuracy 10. Utilizes complete solid-state design and maintenance-free design 11. Prevents overvoltage and overcurrent conditions generated by active loads 12. Drives capacitive loads through four-quadrant output |
|
10KV |
100W |
1. Output voltage: 0 to ±10kVDC or peak AC 2. Output current: 0 to ±10 mA DC or 40mA peak AC for 1 ms 3. Slew rate: greater than 150 V/μs 4. Large signal bandwidth: DC to greater than 15kHz (-3dB) 5. DC voltage gain: 500 V/V 6. OEM customization available 7. Dynamic adjustment to optimize AC response for various load parameters 8. Local and remote high voltage on/off function, short circuit protection 9. Low output noise, closed-loop system ensures high precision 10. Take advantage of the complete solid-state design and maintenance-free design 11. Protection against overvoltage and overcurrent conditions generated by active loads 12. Drive capacitive loads with four-quadrant output |
|
10KV |
400W |
1.Output voltage: 0 to ±10 kV DC or peak AC 7. Dynamically adjust to optimize AC response for various load parameters 8. Local and remote high voltage on/off function, short circuit protection 9. Low output noise, closed-loop system guarantees high accuracy 10. Utilizes complete solid-state design and maintenance-free design 11. Prevents overvoltage and overcurrent conditions generated by active loads 12. Drives capacitive loads through four-quadrant output |
|
20KV |
400W |
1. Output voltage: 0 to ±20 kV DC or peak AC 5. DC voltage gain: 2000 V / V 7. Dynamically adjust to optimize AC response for various load parameters 8. Local and remote high voltage on/off function, short circuit protection 9. Low output noise, closed-loop system guarantees high accuracy 10. Utilizes complete solid-state design and maintenance-free design 11. Prevents overvoltage and overcurrent conditions generated by active loads 12. Drives capacitive loads through four-quadrant output |
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200KV 250KV 300KV 350KV 400KV 450KV |
2000W |
1. Power factor corrected input 86Vac~265Vac 2. Models from 200KV to 450kV,2kW 3. Air Insulated,Low energy storage,Fast response 4. Low starting voltage,100V 5. Operation is guaranteed down to zero voltage 6. low output ripple and noise <0.01%p-p 7. high stability 0.05%/8 hour 8. low temperature coefficient 25ppm/℃ 9. Optional Ethernet, RS-232, RS485 Digital Interfaces 10. Overvoltage, Arc and short circuit Protected 11. Constant Voltage/Constant Current Operation 12. Local or remote control, or digital control 13. Safety interlock function 14. OEM customization available |
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200KV 250KV 300KV 350KV 400KV 450KV 500KV |
4000W |
1. Power factor corrected input 86Vac~265Vac 2. Models from 200KV to 500kV,4kW 3. Air Insulated,Low energy storage,Fast response 4. Low starting voltage,100V 5. Operation is guaranteed down to zero voltage 6. low output ripple and noise <0.01%p-p 7. high stability 0.05%/8 hour 8. low temperature coefficient 25ppm/℃ 9. Optional Ethernet, RS-232, RS485 Digital Interfaces 10. Overvoltage, Arc and short circuit Protected 11. Constant Voltage/Constant Current Operation 12. Local or remote control, or digital control 13. Safety interlock function 14. OEM customization available |
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1KV 2KV 3KV 6KV 8KV 10KV 15KV 20KV 30KV 40KV 50KV 60KV 70KV 80KV 100KV 120KV 130 KV |
10W 30W 60W 100W 150W 300W 600W 1200W 2000W |
1. AC/DC output voltage up to 130KV, output power 2000W 2. Ripple voltage: 0.05% P-P (0.01%p-p can be customized) Temperature coefficient: ≤25ppm/℃ 3. Stability: less than 100ppm/1 hour after starting for half an hour, less than 500ppm/ 8 hours. 4. The starting voltage is low, and it can work stably from 15V 5. 2 kinds of rack mount heights, a variety of models are optional, passed the EU CE certification 6. AC AC220V power supply, optional AC110V power supply, power factor 0.995 7. Strong ability to carry fire, suitable for accelerators and ion beam implantation applications 8. Overvoltage, arc and output short circuit protection, fast ignition recovery speed, 9. Voltage and current automatic cross adjustment function 10. Local or remote control 11. Safety interlock function, high and low level start and stop function 12. OEM customization available 13. High stability 0.01%, low ripple 0.05% 14. Standard ethernet, RS-232, optional RS-485 control |
|
30KV |
600W |
1. Output voltage: 0 to ±30 kV DC or peak AC 2. Output current: 0 to ±20 mA DC or peak AC 3. Conversion rate: greater than 550 V / μs 4. Large signal bandwidth: DC to greater than 2.5kHz (-3dB) 5. DC voltage gain: 3000 V / V 6. OEM customization 7.0-30 kV settling time (to 1%) is less than 200 μs 8. Dynamic adjustment to optimize AC response for various load parameters 9. Local and remote high voltage on/off function, short circuit protection 10. Low output noise, closed loop system to ensure high accuracy 11. Utilize complete solid-state design and maintenance-free design 12. Prevent over-voltage and over-current conditions generated by active loads 13. Drive capacitive load through four-quadrant output |
|
40KV |
600W |
1. Output voltage: 0 to ±40 kV DC or peak AC 2. Output current: 0 to ±15 mA DC or peak AC 3. Conversion rate: greater than 350 V / μs 4. Large signal bandwidth: DC to greater than 2.5kHz (-3dB) 5. DC voltage gain: 4000 V / V 6. Customers can customize by OEM 7. Dynamic adjustment to optimize AC response for various load parameters 8. Local and remote high voltage on/off function, short circuit protection 9. Low output noise, closed loop system to ensure high accuracy 10. Utilize complete solid-state design and maintenance-free design 11. Prevent over-voltage and over-current conditions generated by active loads 12. Drive capacitive load through four-quadrant output |
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1KV 2KV 2.5KV 3KV 5KV 10KV 15KV 20KV 30KV |
5W 10W 20W |
1. Suitable for electron microscope, mass spectrometer MASS 2. Input 220Vac, single phase 3. Output voltage up to 30KV, output power 5W, 10W, 20W 4. Low output ripple and noise <2ppm 5. High stability 50ppm/h, 100ppm/8h, 500ppm/1000h 6. Low temperature coefficient 25ppm/℃ 7. Standard RS-485 control,address can be set and research 8. Suspended ground, six-sided shielding 9. Ooutput voltage channels 512 Max. 10. Each channel can be used independently . 11.Panel control or computer remote control 12.Arc and short circuit protection. 13.Positive or negative output,OEM customization available. |
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3KV 5KV 10KV 15KV 20KV 30KV |
15W |
1. Input voltage 105Vac~125Vac or 210Vac~250Vac. 2. Output voltage 30kVmax, output power 15W. 3. Low output ripple and noise≤ 0.05%p-p. 4. High stability 0.01% per hour. 5. Low temperature coefficient 25ppm/℃. 6. Strong arc protection and short circuit protection. 7. External potentionmeter or external control voltage to set. 8. Air insulation, the mimum storage is 200mJ. 9. Postive or Negative output. |
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8KV 10KV 12KV 15KV 20KV 25KV 30KV 40KV 50KV 60KV |
300W |
1. Input 105Vac-125Vac or 210Vac-250Vac 2. Output voltage up to 60KV, output power 300W 3. Low output ripple and noise less than 0.05% P-P 4. High stability 0.01% per hour 5. Low temperature coefficient 25ppm per degree Celsius 6. Air insulation, fast dynamic response 7. Extremely low arc discharge current, strong ignition protection and short circuit protection 8. External potentiometer or external control voltage given 9. Suitable for harsh and harsh loads 10. Positive or negative polarity output 11. OEM customization |
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1KV 2KV 3KV 6KV 8KV 10KV 15KV 20KV 30KV 40KV 50KV 60KV 70KV 80KV 100KV 120KV 130KV |
10W 30W 60W 100W 150W 300W 400W 600W 750W |
1.AC/DC output voltage up to 130KV, max output power 750W 2. Ripple: 0.1% P-P temperature coefficient: ≤25ppm/℃ 3. Stability: <100ppm per hour after starting for half an hour 4.Two Kinds of chassis height, multiple models can be selected, through the EU CE certification 5.The maximum output voltage ranging from 1KV-130KV 6. Nine models with maximum output power from 10W to 750W are available 7. Overvoltage, arc pulling and output short circuit protection 8. Voltage and current regulation function 9. Local or remote control 10. Security interlock function 11. Can be customized according to user requirements 12. High stability 13. Standard network port,RS-232, RS-485 optional |
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8KV 10KV 12KV 15KV 20KV 25KV 30KV 40KV 50KV 60KV 70KV 80KV 100KV |
3000W |
1. AC/DC output voltage 100KV, output power 3kW 2. Ripple voltage: 0.05%. Temperature coefficient: ≤100ppm/℃. 3. Stability: After starting for half an hour, 0.01%/h, 0.05% every 8 hours. 4. Low starting voltage, fast response, strong resistance to ignition 5. Over voltage, over temperature, arc and output short circuit protection 6. Voltage and current regulation function 7. Local or remote control 8. Security interlock function 9. OEM customization available 10.SEMI certification |