0.05KV

0.1KV

0.15KV

0.2KV

0.25KV

0.5KV

1KV

2KV

3KV

4KV

5KV

6KV

6W

10W

20W

30W

1. Models from 0.05KV to 6kV, 6W to 30W

2. Ultra low output ripple and noise 0.001%p-p

3. Ultra high stability 0.001% per hour

4. Ultra low temperature coefficient 0.001% / ℃

5. Arc and short-circuit protection

6. External voltage to set

7. Compact size,pcb mounting

8. Positive or negative output

9. Six-sided shielding for anti-interference

10. OEM customization available

0.3KV

0.6KV

1KV

1.5KV

3KV

6KV

10KV

15KV

20KV

25KV

30KV

5W

10W

20W

30W

60W

1. Models from0.3kV to 30kV,  5W to 60W

2. Low output ripple and noise less than 0.001% P-P

3. High stability 0.01% every 8 hours

4. Low temperature coefficient 0.0025%/℃

5. Arc and Short Circuit Protected

6. External potentiometer or external control voltage to set.

7. Positive or negative output

8. Small size, Low noise , 6 -sided metal shielding

9. OEM customization available

10. CE certification

11. Input DC 24V

0.25KV

0.5KV

1KV

2KV

4KV

6KV

30W

40W

50W

60W

1. 2-channel,PN:Each channel is controlled separately

2. P OR N:Each channel shares one control signal

3. Each channel from 0.25KV to 6kV, 15W to 30W

4. low output ripple and noise ＜0.04%p-p

5. high stability 0.01%/8 hour

6. low temperature coefficient 25ppm/℃

7. Arc and short-circuit protection

8. External voltage to set

9. Compact size, pcb mounting

10. Optional 1-channel positive , 1-channel negative output

11. Optional 2-channel positive or 2-channel negative output

12. Six-sided shielding has strong anti-interference

13. OEM customization available 

2KV

13W

1、Improves efficiency and wafer throughput three times that of ordinary power supplies；

2、Reduce backside gas errors, improve throughput and eliminate wafer stick/burst problems；

3、Control parameters such as overcurrent, presence of wafer and wafer clamp thresholds, clamp voltage, offset voltage, and internal or external amplitude/offset controls;

4、The versatility of amplitude/offset and output control during adjustment；

5、Control output using rear panel I/O, serial computer commands, or front panel controls;

6、Configuration of custom clamp and clamp removal sequence and waveform;

7、Lockable front panel control interface；

8、Supports Coulombic and Johnsen-Rahbek ESC technologies

9、This section describes how to upload the configuration file of an electrostatic chuck to the device and store it in the device using a user-friendly software interface；

10、Wafer detection includes wafer free, wafer presence, or wafer clamped state

2KV

6W

Power (W)：6

Max Output Voltage (KV)：2

Features and Benefits:

Reliable clamp/release state detection by wafer sensor

Fast response of amplifier architecture design ("no relay polarity inversion" design for high reliability and long life.)

"Dual channel independent control (option)" and "center tap voltage setting (option)" for various chuck/release operations

Equipped with LAN, USB, RS-232C digital interface

Built-in low-pass RF filter (13.56 MHz)

3KV

19.5W

Improves efficiency and throughput: three times that of ordinary power supplies; 

Reducing back-side gas errors, increasing throughput and eliminating wafer sticking/bursting problems;

Control of parameters such as overcurrent, presence of wafer and wafer clamping thresholds, clamping voltage, offset voltage and internal or external amplitude/offset control;

Versatility in amplitude/offset and output control during tuning;

Control of outputs using rear panel I/O, serial computer commands, or front panel controls;

Configuration of custom clamp and de-clamp sequences and waveforms.

Lockable front panel control interface.

Support for Coulombic and Johnsen-Rahbek ESC technologies.

Upload and store electrostatic chuck profiles to the device and store them internally through a user-friendly software interface.

Wafer detection including no wafer, present wafer or wafer clamping status.