ECA series are high voltage amplifiers for electrostatic chucks (E-Chuck, ESC). In addition to polarity switching and forced grounding, this series also offers a wafer monitoring system for wafer inspection needs. Additionally, with a wide voltage range, the series supports Coulomb and Johnsen-Rahbek electrostatic chucks.

Typical Application:

Electrostatically driven material handling

Semiconductor Wafer Processing

Non-mechanical transfer of flat sheets or other processed materials sensitive to mechanical handling

Features and Benefits:

Reliable clamp/release state detection by wafer sensor

Fast response of amplifier architecture design ("no relay polarity inversion" design for high reliability and long life.)

"Dual channel independent control (option)" and "center tap voltage setting (option)" for various chuck/release operations

Equipped with LAN, USB, RS-232C digital interface

Built-in low-pass RF filter (13.56 MHz)

Output voltage setting characteristics:

Waveform example:

Optional CT

Center tap bias

0 to ±[maximum rate voltage - voltage set point]

Optional ET

Ethernet CAT interface

[coming soon]

Optional DS

Dual channel independent control

Optional AC

AC 100V to 240V 1 φ input

Optional L7

Output high voltage cable 7m x 3

(2 when CT or DS is selected)