Product introduction

Wisman High Voltage Power Supply Field emission Scanning electron microscopy application OEM module EMA series High voltage power supply for field emission scanning electron microscopy to provide high-quality images and high resolution, accept customer customization.

The Wisman EMA series is an integrated multi-output high-voltage power supply designed to drive scanning electron microscopes, with all outputs offering ppm low output ripple, ppm stability, ppm temperature coefficient, high accuracy and few micro-discharges. Wisman's 15 years of experience in this application has given us a wealth of knowledge that allows us to tailor it to meet the exacting requirements of electron microscopes.

A compact solution, small in size. All outputs offer low output ripple, excellent stability, temperature coefficient and accuracy. Isolation and control of the appropriate suspension power supply is provided through Wisman's own high voltage isolation technology.

This integrated EMA series power supply system provides customer control via a fiber-optic interface. All high-voltage safety interlocks are designed based on fail-safe hardware, and EMA series power supplies are CE certified in compliance with applicable IEC, UL and SEMI standards.

Typical applications:

Field emission scanning electron microscopy

Electron-beam powered

Product Specifications

(Refer to PDF specifications)

Product Features:

Input voltage: + 24Vdc, ± 5% @ Max 5 amps. Inrush current <6 amps for 1 second.

Safety fuse: 5 x 20mm ceramic fuse, replaced internally and labeled with fuse value.

Leakage current: <200μA

Voltage: relative to ground, 0V to -30kV full load

Power switch: Boat type switch allows the unit to be turned on and off from the front panel.

Setting:

Operating temperature: Ambient temperature + 10°C to + 45°C during normal operation. The unit will operate at 0°C, but will require an extended warm-up time.

Storage temperature: -30°C to + 70°C

Humidity: 10 to 90% RH, non-condensing

Altitude: 2000 m ASL at full power. For altitudes above 2000 m, the maximum ambient operating temperature is linearly reduced by 1.1°C every 300 m interval.

Machinery:

The unit comes with a pair of removable mounting brackets;

The unit can be operated in any direction. The M5 x 23mm protective ground stud is installed near the HV connector

Dimensions: 240mmX130mmX332mm

Weight: 10.2kg (22.5lb)

Power supply for acceleration

Output voltage:

-100V to -30kV, negative polarity.

Adjustable voltage of 32.5kV unloaded current can be set.

Under no circumstances will the output be greater than 35kV. The output can be set to OFF, disabling the Beam Energy converter, in which case the output will be <60 volts.

Output current:

Max. 200μA, 20kV to 30kV

Output current protection range:

250μA± 10% Output disabled and locked with a delay of about 1 second. Program voltage is set to zero.

Accuracy (voltage given) :

< 1% or ±10V within the control range (whichever is greater)

Voltage control:

16-bit DAC, resolution 0.5V, full scale = 32,768 volts

Linearity:

-20 to -30kV <±25V

Load adjustment rate:

For load changes from 30μA to 200μA, <±100mV

Line adjustment rate:

Line change from 22.8V to 26.4V <±10ppm

Ripple:

HF<25mVp-p LF< 50mVp-p@0uA to 200uA, 0.1Hz to 20MHz

Temperature coefficient:

From +10℃ to +45℃<10ppm /℃, from +20℃ to +30℃ <5ppm /℃

Stability:

<200mV / 15 minutes after preheating for 1 hour under constant operating conditions.

Voltage display:

16-bit, 0.5V resolution. Accuracy relative to the actual output voltage is ± 2% or ±10V.

Current display:

12-bit, 100nA resolution, accuracy ± 2% or ±1μA.

Wiggle amplitude:

0% to 100% modulation with a step size of 1%, where 100% is defined as ± 5% of the beam energy output, with a minimum of ±50V. The peak-to-peak value is twice the amplitude.

Wobble period:

666 to 2000 milliseconds. Step size can be adjusted to 1 ms. Sinusoidal output, 16 points per cycle. The wobble always starts and stops at zero intersections.

To store energy:

<850mJ

Filament power supply:

Connections:

The center of the filament is connected to the Beam Energy output. The output can be set to off, disabling the filament converter.

Filament voltage:

The nominal value is 1.8V and the maximum is 3V

Filament current:

Control range is 0.5A to 3A

Load resistance:

Nominal value 0.6Ω

Accuracy:

±5mA between 2 and 3 amps

Current control:

12-bit DAC with 1mA resolution. Full scale = 4.096 amps

Linearity:

±10mA between 0.5A and 3A

Load adjustment rate:

Change of 0.4Ω to 1.0Ω <5mA at 3A. (Including output line)

Line adjustment rate:

Power supply voltage change 5% <1mA.

Linearity:

±10mA between 0.5A and 3A

Ripple:

At 0.6mA @ 3.0A, <1mAp-p, 20Hz to 10kHz, <30mV pp, about 100kHz

Temperature coefficient:

<25PPM /℃

Stability:

<2mA / 60 minutes. After one hour of preheating under constant operating conditions.

Voltage display:

12-bit, resolution 2.5V, full scale = 10.24V.

Accuracy relative to actual output voltage: ± 5% or ±25mV

Current display:

12-bit, resolution +/- 1mA, full scale = 4.096 amps.

Accuracy is ±10mA relative to actual output current.

Open filament alarm OC:

Open circuit detection, Vout> 5.2±0.1 volts. Will disable all outputs and set the program to zero.

Filament overcurrent protection:

Overcurrent is detected if the output current is greater than 3.15A for ten seconds. All outputs will be disabled and the program set to zero.

Extract pole power

Output voltage:

0V to 10kV (positive relative to acceleration voltage).

Control range + 100V to + 10kV. The output can be set to OFF, disabling the extractor converter.

Output current:

Control range 700μA.

Programmed overcurrent value:

Programmable 0 to 735μA, resolution 0.25μA. Accuracy ± 2% or 2μA. All outputs should be disabled and the program set to zero

Accuracy (voltage given) :

< 1% or ±20V within the control range (whichever is greater)

Voltage control:

12-bit DAC, resolution 2.5V, full scale = 10.24kV

Linear:

±20V within the control range

Load adjustment rate:

<±1V (10 μA-700 μA output current change)

<100mV @ 40μA0.1Hz to 20MHz

Enter the adjustment rate:

+/- 5% line change <±5ppm

Ripple:

<20mVp-p at 10kV, 700μA, 0.1Hz-20MHz

Temperature coefficient:

<25ppm/℃

Stability:

<0.05V / 15 min; After one hour of preheating under constant operating conditions

Slope:

10V/s to 1000V/s

Voltage display:

12-bit, resolution 2.5V, full scale = 10.24kV.

Accuracy relative to actual output voltage: ± 1% or ±20V

Current display:

12-bit, resolution 0.25uA, full scale = 1.024mA.

Accuracy relative to actual output voltage: ± 2% or ±2uA

Protection:

Continuous/intermittent arc to acceleration power and ground.

To store energy:

<150mJ

Suppressor power supply

Voltage:

0V to 1000V (negative relative to acceleration voltage).

Control range 100V to 1000V. The output can be set to OFF, disabling the extractor converter.

Output current:

Control range <200μA.

Overcurrent protection:

100μA± 10% with a delay of 5 seconds will disable all outputs and set the program to zero.

Accuracy (voltage given) :

< 2% or ±6V within the control range (whichever is greater)

Voltage control:

12-bit, resolution 0.25V, full scale = 1024V

Linear:

±5V within control

Load adjustment rate:

For load current changes from 10μA to 100μA, <120mV.

Enter the adjustment rate:

+/- 5% line change <±5ppm

Ripple:

Control range <10mV pp, 0.1Hz to 20 MHz.

Temperature coefficient:

<25PPM /℃

Stability:

<0.1V / 15 min; After one hour of preheating under constant operating conditions

Voltage display:

12-bit, resolution 0.25V, full scale = 1.000kV.

Accuracy relative to actual output voltage: ± 2% or ±250mV

Current display:

12-bit, resolution 0.25uA, full scale = 0.2mA.

Actual output current accuracy: ± 10%

Protection:

Continuous/intermittent arc to acceleration power supply or extraction pole power supply

To store energy:

< 2.5 mJ