INTRODUCTION:

The OEM module FEM series high-voltage power supply used by Wisman high-voltage power supply for field emission scanning electron microscope applications provides guarantee for high-quality images and high resolution of field emission scanning electron microscopes, and accepts customer customization.

Wisman FEM series is an integrated multi-output high-voltage power supply, specially designed to drive scanning electron microscopes. All outputs provide ppm-level low output ripple, ppm-level stability, ppm-level temperature coefficient, high precision and Little discharge. Wisman has been researching this application for 15 years and has accumulated a wealth of knowledge so that we can customize it according to customer needs to meet the demanding requirements of electron microscopes.

With a compact solution, the expansion bracket can be installed in a 19-inch rack. All outputs provide ultra-low output ripple, excellent stability, temperature coefficient and accuracy. Provide isolation and control of the corresponding floating power supply through Wisman own high-voltage isolation technology.

For this integrated FEM series power system, customer control is done through optical fiber interfaces. All high-voltage safety interlocks are designed based on fail-safe hardware. FEM series power supplies have passed CE certification and comply with applicable IEC, UL and SEMI standards.

Typical Application:

Field emission scanning electron microscope

Electron beam power supply

Product specifications

(Refer to the PDF specification)

Product Features:

Input voltage: +24Vdc, ±5%@maximum 5 amps. Surge current <6 ampere, lasts 1 second.

Safety fuse: 5 x 20mm ceramic fuse, which can be replaced from the outside and marked with fuse value.

Leakage current: <200μA

Voltage: relative to ground, 0V to -30kV full load

Power switch: The rocker switch allows the device to be turned on and off from the front panel.

Specifications

Input Voltage:

+24Vdc, ±5% @ 5 amps maximum.

Inrush is <6 amps for 1 second.

Safety Fuse: A 5 x 20mm ceramic fuse changeable from the outside and marked with the fuse value.

Leakage Current: < 200μA to case

Voltage:0V to -30kV full load with respect to ground

Power Switch: The rocker switch allows the device to be turned on and off from the front panel.

Environmental:

Operating Temperature:+10°C to +45°C ambient for normal operation.

The unit will operate from 0°C but will require an extended warm up period.

Storage Temperature:-30°C to +70°C

Humidity: 10 to 90% RH, non-condensing

Altitude: 2000 meters ASL at full power. For altitudes above 2000 meters the maximum ambient operating temperature is linearly derated by 1.1℃ per 300 meter interval.

Mechanical:

The unit is provided with a pair of removable mounting flanges; these allow the unit to mount in a 19” rack system. The unit can be operated in any orientation. An M5 x 23mm protective ground stud is mounted in the vicinity of the HV connector.

Accelerator Supply

Output Voltage: -100V to -30kV, negative polarity. A conditioning voltage of

32.5kV with no load current is settable. The output will not exceed 35kV under any condition. The output can be set to OFF which disables the Beam Energy converter, in this case the output will be <60 volts.

Output Current:

200μA maximum, 20kV to 30kV

Output Current Trip Level:

250μA ±10% The output is disabled and latched off with a delay of approximately 1 second. The program voltage is set to zero.

Accuracy (Voltage Program):

<1% or ±10V (Take the larger value) over control range

Voltage Control:

16 bit, resolution 0.5V, full scale = 32,768 volts

Linearity:

-20 to -30kV <±25V

Load Regulation:

<±100mV for a 30μA to 200μA load change

Line Regulation:

<±10ppm from 22.8V to 26.4V line change

Ripple:

<50mVp-p @ 0uA to 200uA, 0.1Hz to 20MHz

Temperature Coefficient:

<10ppm/℃ from +10℃ to +45℃,

<5ppm/℃ from +20℃ to +30℃

Stability:

<200mV/15 minute period after 1 hour warm up under constant operating conditions.

Voltage Monitor:

16 bit, resolution 0.5V. Accuracy with respect to actual output voltage is ±2% or ±10V.

Current Monitor:

12 bit, resolution 100nA, accuracy is ±2% or ±1μA.

Wobble Amplitude:

0 to 100% modulation in steps of 1%, where 100% is defined as ±5% of the Beam Energy output with a minimum value of ±50V. The peak to peak value is twice the amplitude.

Wobble Period:

666 to 2000 milliseconds. Adjustable in 1 millisecond steps. A sinusoidal output with 16 points per period. The wobble always starts and stops at a zero crossing.

Stored Energy:

<850mJ

Filament Supply:

Connection:

The center of the filament is connected to the Beam Energy output. The output can be set to off which disables the filament converter.

Voltage:

Nominally 1.8V, maximum 3V

Maximum Current:

Control range 0.5A to 3A

Load Resistance:

Nominal at 0.6Ω

Accuracy:

± 5mA between 2 and 3 Amperes

Current Control:

12 bit, resolution 1mA. Full scale = 4.096 Amperes

Linearity:

± 10mA between 0.5A and 3A

Load Regulation:

<5mA for 0.4Ω to 1.0Ω change at 3A. (Including output lead)

Line Regulation:

<1mA for 5% change in supply voltage.

Linearity:

± 10mA between 0.5A and 3A

Ripple:

<1mAp-p, 20Hz to 10 kHz and <30mV p-p at approximately 100kHz both across 0.6mA @ 3.0A

Temperature Coefficient:

<25ppm/℃

Stability:

<2mA/60 minutes. After one hour warm up under constant operating conditions.

Voltage Monitor:

12 bit, resolution 2.5V, full scale = 10.24V. Accuracy with respect to actual output voltage: ±5% or ±25mV

Current Monitory:

12 bit, resolution +/-1mA, full scale = 4.096 Amperes.Accuracy with respect to actual output current ±10mA.

Trip OC:

Open circuit detection, Vout > 5.2 ± 0.1 Volts. All outputs will be disabled and programs set to zero.

Trip Current:

Over current detected if the output current exceeds 3.15A for ten seconds. All outputs will be disabled and programs set to zero.

Extractor Supply

Voltage:

0V to 10kV (positive with respect to Beam Energy). Control range +100V to +10kV. The output can be set to OFF which disables the extractor converter.

Current:

700μA over control range.

Current Trip Level:

Programmable 0 to 735μA resolution 0.25μA. Accuracy ±2% or 2μA. All outputs shall be disabled and programs set to zero

Accuracy (Voltage Program):

<1% or ±20V (Take the larger value) over control range

Voltage Control:

12 bit, resolution 2.5V, full scale = 10.24kV

Linearity:

±20V over the control range

Load Regulation:

<±1V (10μA – 700μA output current change)

<100mV @ 40μA 0.1Hz to 20MHz

Line Regulation:

<±5ppm for a +/-5% line change

Ripple:

<20mVp-p at 10kV, 700μA, 0.1Hz – 20MHz

Temperature Coefficient:

<25ppm/℃

Stability:

<0.05V/15 minutes; after one hour warm up under constant operating conditions

Ramp Rate:

10V/s to 1000V/s

Voltage Monitor:

12 bit, resolution 2.5V, full scale = 10.24kV. Accuracy with respect to actual output voltage: ±1% or ±20V

Current Monitor:

12 bit, resolution 0.25uA, full scale = 1.024mA. Relative to the actual output voltage accuracy: ± 2% or ± 2uA

Protection:

Continuous/intermittent arcs to the Beam Energy supply and ground.

Stored Energy:

<150mJ

Suppressor Power Supply

Voltage:

0V to 1000V (negative with respect to the acceleration voltage).

Control range 100V to 1000V. The output can be set to OFF to disable the extractor converter.

Output  Current:

Control range <200μA.

Over Current Protection:

100μA±10%, a delay of 5 seconds, will disable all outputs and set the program to zero.

Accuracy (Voltage Program):

Within the control range <2% or ±6V (Take the larger value)

Voltage Control:

12 bits, resolution 0.25V, full scale = 1024V

Linearity:

Within the control range ±5V

Load Regulation:

For load current changes from 10μA to 100μA, <120mV.

Input Adjustment Rate:

+/- 5% line change <±5ppm

Ripple:

The control range is <10mV pp, 0.1Hz to 20 MHz.

Temperature Coefficient:

<25PPM /℃

Stability:

<0.1V / 15 minutes; after one hour of preheating under constant operating conditions

Voltage Display:

12 bits, resolution 0.25V, full scale = 1.000kV.

Relative to the actual output voltage accuracy: ± 2% or ± 250mV

Current Display:

12 bits, resolution 0.25uA, full scale = 0.2mA.

Actual output current accuracy: ±10%

Protect:

Continuous/intermittent arc to acceleration power supply or extraction pole power supply

Energy Storage:

<2.5mJ

PMT Supply

Voltage:

0V to -1300V (negative with respect to the ground voltage)

The control range is -100V to -1300V. The output can be set to OFF to disable the extractor converter.

OutputC urrent:

Control range <1000μA.

Over Current Protection:

1000μA±10%, a delay of 5 seconds, will disable all outputs and set the program to zero.

Accuracy (Voltage Program):

Within the control range <2% or ±6V (Take the larger value)

Voltage Control:

12 bits, resolution 0.25V, full scale = 1024V

Linearity:

Within the control range ±5V

Load Regulation:

For load current changes from 10μA to 100μA, <120mV.

Input Adjustment Rate:

+/- 5% line change <±5ppm

Ripple:

The control range is <10mV pp, 0.1Hz to 20 MHz.

Temperature Coefficient:

<25PPM /℃

Stability:

After preheating for one hour, ±0.02%, per hour/H

Voltage Display:

12 bits, resolution 0.25V, full scale = 1.024kV.

Relative to the actual output voltage accuracy: ± 2% or ± 250mV

Current Display:

12 bits, resolution 0.25uA, full scale = 1000uA.

Actual output current accuracy: ±10%

Protect:

Continuous/intermittent arc to acceleration power supply or extraction pole power supply

Energy Storage:

<2.5mJ

Scintillator Power Supply

The Output Voltage:

0V to 10kV (Positive with respect to the grand voltage).

The control range is +100V to +10kV. The output can be set to OFF to disable the extractor converter.

Output Current:

The control range is 200μA.

Programming Over Current Current Ralue:

Programmable 0 to 200μA, resolution 0.25μA. The accuracy is ±2% or 2μA. All output should be disabled and the program should be set to zero

Accuracy (Voltage Program):

Within the control range <1% or ±20V (Take the larger value)

Voltage Control:

12 bits DAC, resolution 2.5V, full scale = 10.24kV

Linearity:

Within the control range ±20V

Load Regulation:

<±1V (10μA-200μA output current change)

<100mV @ 40μA 0.1Hz to 20MHz

Input Adjustment Rate:

+/- 5% line change <±5ppm

Ripple:

<20mVp-p at 10kV, 200μA, 0.1Hz-20MHz

Temperature Coefficient:

<25ppm/℃

Stability:

<2V / 15 minutes; after one hour of preheating under constant operating conditions

Slope:

10V/s to 1000V/s

Voltage Display:

12 bits, resolution 2.5V, full scale = 10.24kV.

Relative To The Actual Output Voltage Accuracy: ±1% or ±20V

Current Display:

12 bits, resolution 0.25uA, full scale = 0.2mA.

Relative To The Actual Output Voltage Accuracy: ± 2% or ± 2uA

Protect:

Continuous/intermittent arc to accelerating power source and earth.

Energy Storage:

<150mJ

Lens power supply

Output Voltage:

0V to 10kV(Positive with respect to the earth )

Output Current:

Control range 200uA

Program Over-current Current Value

Programmable 0 to 200uA,resolution 0.25uA. The accurancy is ±2% or 2uA. All output should be disabled and the program should be set to 0.

Accuracy(Voltage Program)

Within the control range ＜1% or ± 20V(Take the larger value)

Voltage Control:

12-bit DAC, resolution 2.5V, full scale = 10.24kV

Linearity:

Within the control range ±20V

Load Regulation:

<±1V (10μA-200μA output current change)

<100mV @ 40μA 0.1Hz to 20MHz

Input Adjustment Rate:

+/- 5% line change <±5ppm

Ripple:

<20mVp-p at 10kV, 200μA, 0.1Hz-20MHz

Temperature Coefficient:

<25ppm/℃

Stability:

<0.3V / 15 minutes; after one hour of preheating under constant operating conditions

Slope:

10V/s to 1000V/s

Voltage Display:

12 bits, resolution 2.5V, full scale = 10.24kV.

Relative to the actual output voltage accuracy: ±1% or ±20V

Current Display:

12 bits, resolution 0.25uA, full scale = 0.2mA.

Relative to the actual output voltage accuracy: ± 2% or ± 2uA

Protect:

Continuous/intermittent arc to accelerating power source and earth.

Energy Storage:

<150mJ

Vacuum Interlock: The vacuum interlock is an optical interlock, which is generated when the optical fiber exists on the optical fiber. When there is no light, the interlock is disconnected and the device turns off all outputs.

Indicator Light:

Power-on Indicator Light (front panel):

The green LED will light up, indicating that the +24V power supply is on. The LED will light up in the range of 22.8 to 25.2 volts, and will            flash in a 1-second period when the range is exceeded.

Vacuum Interlock Indicator (front panel):

The yellow LED will light up, indicating that all vacuum interlocks are closed. The vacuum interlock LED must be illuminated to make the            device generate high voltage.

Protect:

All outputs are protected by load and continuous short circuit, and are not affected by arcs.

The output dielectric strength test voltage capacity is 36kV, but the output cannot exceed this voltage.

All low-voltage inputs can prevent overvoltage of ±30 volts. The power input has overvoltage protection and reverse connection                          protection.

Over Temperature:

Any semiconductor device that exceeds the over-temperature condition for more than ten seconds will start to shut down and send an              error message.

Shutdown Requirements:

The acceleration power can be turned off independently.

The filament power supply, the suppression pole power supply and the extraction pole power output (transmission) are turned off together.

For information concerning our high voltage products, please call at 086-029-33693480 or visit our website www.wsmhv.com.

Wisman advances medical care, industrial processes, quality control, scientific research, security and telecommunications by providing innovative high voltage power supplies including micro-modules high voltage power supply, modules high voltage power supply, X-ray generator, rack mount voltage power supply, special customized high voltage power supply, high voltage accessories, etc. that enable equipment manufacturers to improve their systems’ performance, reliability, cost and bottom line. Power range from 100mW to 200kW, voltage range from 60V to 500kV. You can purchase multiple varieties and specifications in one-stop from us. We have a high-voltage power supply research and development team, high-voltage power supply development software and software for testing high voltage insulation technology and zero current resonance technology, making our high voltage power supplies maintain high stability, low ripple, excellent in EMC. Our products are compact, highly efficient with a long operating life.

Wisman high voltage power supplies are competitively priced and a great idea for OEM customers.